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just got reminded of the existence of MEMS* gas mass flow meters

*i *guess* you could still call it "MEMS" if the only moving part is the gas you're measuring?

 a black and white (presumably SEM) image, showing a trench in a chip die, with a few bridges crossing the gap, with various circuitry crossing/suspended on the bridges
a diagram, labelled "cross-sectional view of flow sensor chip", showing how a heater in the center of a bridge heats the air, and two adjacent thermopiles measure the heat flow in each direction